Crosstalk-free large aperture electromagnetic 2d micromirror for lidar application

Abstract This paper presents a novel design of 2D electromagnetic micromirror without crosstalk. The proposed uses flexible printed circuit board (FPCB) and four layers coils embedded in the polyimide layers. insulated coil allow for independent actuation mirror plate to rotate about two orthogonal axes. diamond shaped hyperbola-shaped magnetic field on under 45-degrees FPCB frame eliminate mechanical Finite element analysis was used predict micromirror’s behavior. prototype is scanning LiDAR, results indicate that crosstalk-free pattern yielded significantly clearer results, particularly detecting object boundaries reducing barrel distortion. experimental test has verified working principle showed good quality: no crosstalk an improvement horizontal view up 19% But with cost vertical by 12%. large aperture 19 × mm 2 , which very suitable coaxial LiDAR.